No abstract

In this paper a new microgripper will be presented. The specific feature is the microfabrication based on a UVlithographic process in microstructurable, photosensitive glass. Technological and manufacturing problems of the gripper will be described. The developed microgripper is actuated by a piezoelectric ceramic (monomorph). Glass microstructures are used as solid state hinges. With the special design of the gripper it is possible to realise a high distance ratio. The deflection of the gripping arms is some hundred micrometers. The gripping forces are a few mN up to 50 mN. The new grippers were fabricated and tested successfully.

No abstract

The photosensitivity in UV-range of some glasses can be used for micro structuring. The irradiated areas crystallize after a thermal treatment. Microstructures are achieved by wet-chemical etching of the crystallized areas. Interactions between UV-laser radiation of different wavelength and the photosensitive glass are investigated. The relationship between process parameters and geometry of microstructures is examined

No abstract