No abstract

As the micro assembly becomes more and more important, it is necessary to make it reliable and expeditious. In this paper the scope is on the micro assembly in the chamber of the scanning electron microscope during which a micro gripper approaches the specimen holder and the micro components positioned on it are picked up. The current design of equipment in the SEM chamber does not allow an assessment of the position in the z-direction that causes that tips of micro grippers could break if they collide with the specimen holder. Here is described the video system consisted of micro camera with the magnifications lenses and mess stripe, which enables accurately watching the approaching to the micro components and exact calculation of the distance between micro gripper and the micro component.

This paper presents a novel approach to assembly of micro components in a scanning electron microscope (SEM) chamber. A new set, called Protective Cover for micro components, allows their quick positioning on the platform inside the SEM chamber without gluing. It is well known that the vacuum pumps, especially turbo one, which evacuated a SEM chamber, are highly sensitive to foreign object damage. This is the reason why the micro components are glued on the specimen holder in the SEM chamber. On the other hand, the grippers that have to pick, lift and place the micro components in a desired system (position, orientation) are very fragile. They can not overcome the adhesive force of the glue and remove the particle from the specimen holder. The presented system is standardized and can be mounted without additional time, modification or expenses into the SEM chamber. It enables, on the one hand, easier manipulation of the micro components that do not need to be glued on the specimen holder and, on the other hand, introduces further automation in the manipulation process in the SEM chamber since it creates thus a necessary basis for modular assembling system. Furthermore, it is very important for the automated assembly process that the micro components are exactly positioned. The standardisation in the micro world becomes more and more essential. The uniformity of parts, operations and tools strongly supports an automatic assembly system.

This paper presents a novel approach to assembly of micro components in a scanning electron microscope (SEM) chamber. A new set, called Protective Cover for micro components allows their quick positioning on the platform inside the SEM chamber without gluing. It is well known that the vacuum pumps, especially turbo one, which evacuated a SEM chamber, are highly sensitive to foreign object damage. This is the reason why the micro components are glued on the specimen holder in the SEM chamber. On the other hand, the grippers that have to pick, lift and place the micro components in a desired system (position, orientation) are very fragile. They can not overcome the adhesive force of the glue and remove the particle from the specimen holder. The presented system is standardized and can be mounted without additional time, modification or expenses into the SEM chamber. It enables, on the one hand, easier manipulation of the micro components that do not need to be glued on the specimen holder and, on the other hand, introduces further automation in the manipulation process in the SEM chamber since it creates thus a necessary basis for modular assembling system. Furthermore, it is very important for the automated assembly process that the micro components are exactly positioned. The standardization in the micro world becomes more and more essential. The uniformity of parts, operations and tools strongly supports an automatic assembly system.