Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber

Cvetanovic, Al.; Cvetanovic, An.; Deutschinger, A.; Giouroudi, Ioanna; Brenner, W.

doi:10.1016/j.mee.2009.06.031

Cited by 5 publications

(3 citation statements)

References 1 publication

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“…Vision-based depth sensing was also realized by installing an optical microscope and camera to the SEM chamber wall for detecting tool tip depth 73,74 . This method's detection resolution is limited by the Abbe diffraction limit of optical microscopy (that is, hundreds of nanometers).…”

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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“…Recently, the use of an infrared camera in conjunction with a reflective micro-patterned scale installed perpendicular to a reflective substrate was reported, as shown in Figure 2.1 [36].…”

Section: Integration Of Additional Vision Systemsmentioning

confidence: 99%

Contact detection for nanomanipulation in a scanning electron microscope

2012

Ultramicroscopy

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A major difficulty in the fabrication of nanostructure based electronics is the lack of effective processes capable of precisely arranging nanostructures into predefined positions. Top-down approaches introduce increased complexity and a high cost for practical industrial use, while bottom-up approaches are probabilistic in nature and do not provide precise control of nanostructure properties (i.e., number, diameter), which influence device performance.Alternatively, nanomanipulation promises specificity, precision and programmed motion and its automation may facilitate the large-scale fabrication of nanostructure based devices.This study focuses on the development of an automated contact detection algorithm which positions an end-effector in contact with a target surface without the need for additional equipment, devices or sensors. We demonstrate this algorithm as an enabling feature for automated nano-FET biosensor construction with precise control over nanowire parameters thereby reducing device-to-device variability and also potentially allowing us to optimize individual device performance.iii

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“…For more details with respect to the MAS and the control system see Cvetanovic et al (2010). Figure 2 shows the top view and the tips of the investigated micro gripper in detail.…”

Section: System Overviewmentioning

confidence: 99%

Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique

et al. 2010

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A micromachined electro-thermal gripper, first introduced by Ivanova et al. (Microelectron Eng 83:1393-1395, represents a promising candidate for the manipulation and handling of micro or even nano-scaled objects. To further optimize the performance of the device, a detailed electrical and mechanical characterization is needed. Due to the so-called duo-action gripper approach (i.e., a separate actuator for closing and opening action) these investigations focused on the maximum (minimum) opening width being 11.5 lm (3.3 lm), while in rest position a value of 4 lm is feasible. The maximum, electrical input power is limited to 80 mW/actuator element, resulting in a current density of up to 1.27 MA cm -2 in the corresponding metal layers. When applying, however, larger current densities the probability of device failure increases substantially as in combination with an enhanced temperature of about 200°C electromigration effects occur in the metallization. Furthermore, the cut-off frequency and parasitic effects during actuation such as the z-deflection and the increase in length of each arm both showing values of up to 3 lm have been investigated as a function of operation parameters. Finally, the tips of the gripper were sharpened using Focused Ion Beam technique to a radius of less than 1 lm for gripping operations in space-restricted environments or for the manipulation or handling of sub-lm scaled objects.

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Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber

Cited by 5 publications

References 1 publication

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Contact detection for nanomanipulation in a scanning electron microscope

Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique

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