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We propose an in-line digital microscopic holography system for testing of microstructures. With the incorporation of a long-distance microscope with digital holography, the system is capable of imaging test microstructures with high resolution at sufficient working distances to permit good illumination of samples. The system, which was developed in an in-line configuration, achieves high imaging capacity and exhibits properties that are favorable for micromeasurement. We demonstrate the performance of the system with experiments to determine the displacement of a silicon microcantilever and with investigations of the microscopic resolution capability.

Phase-unwrapping algorithms, an active and interesting subject in recent years, are important in a great number of measurement applications. Active research is being undertaken to develop reliable and high-speed procedures. The current process uses a gray-scale mask and the flood-fill concept from image processing for phase unwrapping. The algorithm unwraps phase from an area with higher reliability to one with lower reliability. In addition to robustness, the speed of the algorithm proposed is much faster than conventional routines. The experimental results of different algorithms are compared by analysis of a tooth plaster and a photoelastic specimen.

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