No abstract

Aluminum-coated silicon substrates are commonly used for various micro/nanooptoelectromechanical systems (MOEMS/NOEMS) including Digital Micromirror Devices (DMD Ò ). For efficient and failure proof operation of these devices, ultra-thin lubricant films of self-assembled monolayers (SAMs) are increasingly being employed. Fluorinated molecules are known to exhibit low surface energy, adhesion, and friction, desirable for tribological applications. In this study, we investigate contact angle, surface energy, friction, adhesion, and wear properties of a perfluoroalkylphosphonate SAM and compare them with those of alkylphosphonate SAMs. The influence of relative humidity, temperature, and sliding velocity on the friction and adhesion behavior is studied. Failure mechanisms of SAMs are investigated by wear tests. These studies are expected to aid in the design and selection of proper lubricants for MOEMS/ NOEMS.