A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.

We achieved a continuous, stable, ultrashort pulse hard x-ray point source by focusing 1.8-W, 1-kHz, 50-fs laser pulses onto a novel, 30-microm -diameter, high-velocity, liquid-metal gallium jet. This target geometry avoids most of the debris problems of solid targets and provides nearly 4pi illumination. Photon fluxes of 5x10(8) photons/s are generated in a two-component spectrum consisting of a broad continuum from 4 to 14 keV and strong K(alpha) and K(beta) emission lines at 9.25 and 10.26 keV. This source will find wide use in time-resolved x-ray diffraction studies and other applications.

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