Laser ablation of dielectrics with temporally shaped femtosecond pulses

Stoian, Razvan; Boyle, M.; Thoß, Andreas; Rosenfeld, A.; Korn, G.; Hertel, I. V.; Campbell, Eleanor E. B.

doi:10.1063/1.1432747

Cited by 180 publications

(94 citation statements)

References 14 publications

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“…DOI: 10.1103/PhysRevLett.101.167601 PACS numbers: 79.20.Rf, 61.80.Jh, 61.82.Pv, 81.16.Rf Energetic atomic [1-3], molecular or cluster ions [4] impacting solids may leave tiny holes at the surface often surrounded by a raised region of displaced material. The observed surface morphology [1][2][3][4] is similar to what is found in ablation craters produced by an intense laser pulse [5,6], in macroscopic craters produced by meteorite impacts on planets [7], or by balls dropped into granular media [8], although their spatial scales may differ by about 17 orders of magnitude. Depending on the energy regime of the ions and the type of material being bombarded, the shape of the impact features and the underlying mechanisms of formation may differ [9,10].…”

supporting

confidence: 53%

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

et al. 2008

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We report on craters formed by individual 3 MeV=u Au q ini þ ions of selected incident charge states q ini penetrating thin layers of poly(methyl methacrylate). Holes and raised regions are formed around the region of the impact, with sizes that depend strongly and differently on q ini . Variation of q ini , of the film thickness and of the angle of incidence allows us to extract information about the depth of origin contributing to different crater features. DOI: 10.1103/PhysRevLett.101.167601 PACS numbers: 79.20.Rf, 61.80.Jh, 61.82.Pv, 81.16.Rf Energetic atomic [1-3], molecular or cluster ions [4] impacting solids may leave tiny holes at the surface often surrounded by a raised region of displaced material. The observed surface morphology [1][2][3][4] is similar to what is found in ablation craters produced by an intense laser pulse [5,6], in macroscopic craters produced by meteorite impacts on planets [7], or by balls dropped into granular media [8], although their spatial scales may differ by about 17 orders of magnitude. Depending on the energy regime of the ions and the type of material being bombarded, the shape of the impact features and the underlying mechanisms of formation may differ [9,10]. As the energy deposited by swift ions of equal kinetic energy, but different charge-states may vary substantially close to the surface, a detailed knowledge of charge-state dependent effects is of great importance for ion-beam based techniques of materials structuring (such as ion-track etching), particularly considering the new demands for smaller pattern sizes and the use of thinner layers [11]. Our results give direct evidence for a strong dependence of the surface modifications introduced by single fast ions on their charge state. For track-etching procedures, this means it is possible to control the etching sensitivity at the surface and charge equilibration below the surface should yield different etched shapes, dependent on the incident charge state. Moreover, by employing a series of well-defined nonequilibrium charge states, we could derive depth information on the near-surface effects induced by single fast ion impacts.In this Letter, we focus on cratering induced by high velocity ions. At specific kinetic energies of a few MeV per nucleon, such ions transfer more than 99% of their energy to the target-electron system. A considerable fraction of the energy deposited in the track of a swift heavy ion is concentrated in a core region ( % 1 nm), where ionizations are directly produced by the ions. Fast secondary electrons spread the rest of the energy over larger distances. The exact size of such regions depend on the material and on the velocity of the ions, while the total amount of energy loss per path length, S e ¼ dE e =dx, is well understood [12]. The subsequent electron dynamics, however, is a nonlinear phenomenon and it may result in large sputter yields and cratering, due to the coupling of electronic and atomic degrees of freedom [13][14][15]. For reviews on ion-induced electronic cratering pr...

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confidence: 53%

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

et al. 2008

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“…[1][2][3][4] Double pulse ͑DP͒ irradiation has been also used in experiments aiming to elucidate the ablation mechanisms, or to modify the properties of the ablated species. 5,6 Most of these studies deal with ULA of a silicon ͑Si͒ target, while DP ULA of metals has been less investigated.…”

Section: Introductionmentioning

confidence: 99%

Double pulse ultrafast laser ablation of nickel in vacuum

Donnelly

Lunney

Amoruso

et al. 2009

Journal of Applied Physics

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We have studied ultrafast laser ablation of nickel using a pair of identical Ϸ250 fs 527 nm laser pulses separated by Ϸ1 to Ϸ1000 ps. Scanning white light interferometry was used to measure the ablated volume, and an ion probe was used to measure the angular distribution of the ablation plasma plume and the total ion emission. As the delay of the second pulse increased from Ϸ10 to 100 ps the ablated volume decreased by more than a factor of 2; indeed it falls to a value below the single pulse case. Conversely, it is found that the ion yield is sharply increased in this delay regime. It seems that both these features can be explained by the interaction of the second laser pulse with the ablated material produced by the first pulse.

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“…In such cases, a self-learning, adaptive loop can be incorporated in the pulse shaper to optimize the temporal profile of the pulse based on the targets of specific applications. Figure 5B shows that deep channels can be drilled into fused silica with a few cracks and a low surface roughness by replacing a transformlimited femtosecond laser pulse with shaped pulses of a temporal profile consisting of a train of three intensity spikes with similar amplitudes and a separation of ~ 300 fs, whereas further increasing the separation to ~ 1 ps again leads to poor fabrication quality [7] . In addition, temporally shaped asymmetrical pulse trains have been used to realize the nanoscale ( ~ 100 nm in diameter) ablation of fused silica [34] .…”

Section: Optics For Temporal Pulse Shapingmentioning

confidence: 99%

“…From an optical point of view, such high precision imposes very stringent requirements on the spatial and temporal characteristics of the laser pulses. On the other hand, as the temporal profiles of ultrafast laser pulses can be tailored with temporal resolutions (e.g., the smallest temporal features of tailored pulses) far exceeding the characteristic energy transfer times, temporal pulse shaping has become an efficient way to precisely control the dynamics of energy deposition in materials, significantly improving the fabrication quality [7] . These challenges and opportunities provide strong incentives to develop optical devices and systems for ultrafast laser materials processing with the main aims of improving the resolution, throughput, and surface quality.…”

Section: Introductionmentioning

confidence: 99%

A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods

Sugioka

Cheng

2012

Advanced Optical Technologies

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Ultrafast lasers have excellent characteristics for materials processing in terms of precision and quality. This tutorial paper introduces the basic concepts of ultrafast laser materials processing and the structure and key components of typical ultrafast laser microprocessing systems. The emphasis is on the pulse-shaping devices and systems for controlling and manipulating the spatial, temporal, and polarization properties of focused femtosecond laser pulses.

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Laser ablation of dielectrics with temporally shaped femtosecond pulses

Cited by 180 publications

References 14 publications

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

Double pulse ultrafast laser ablation of nickel in vacuum

A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods

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