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This paper presents the design, construction and characterization of a new optical-fiber-based, low-finesse Fabry-Perot interferometer with a simple cavity formed by two reflecting surfaces (the end of a cleaved optical fiber and a plane, reflecting counter-surface), for the continuous measurement of displacements of several nanometers to several tens of millimeters. No beam collimation or focusing optics are required, resulting in a displacement sensor that is extremely compact (optical fiber diameter 125 μm), is surprisingly tolerant of misalignment (more than 5°), and can be used over a very wide range of temperatures and environmental conditions, including ultra-high-vacuum. The displacement measurement is derived from interferometric phase measurements using an infrared laser source whose wavelength is modulated sinusoidally at a frequency f. The phase signal is in turn derived from changes in the amplitudes of demodulated signals, at both the modulation frequency, f, and its harmonic at, 2f coming from a photodetector that is monitoring light intensity reflected back from the cavity as the cavity length changes. Simple quadrature detection results in phase errors corresponding to displacement errors of up to 25 nm, but by using compensation algorithms discussed in this paper, these inherent non-linearities can be reduced to below 3 nm. In addition, wavelength sweep capability enables measurement of the absolute surface separation. This experimental design creates a unique set of displacement measuring capabilities not previously combined in a single interferometer.

This paper demonstrates for the first time a method for surface modification of a substrate material based on the generation of localized vortices of abrasive slurry using slender oscillating fibers. In experiments presented in this paper, the abrasive slurry is a water based suspension of 1 m alumina particles. This is pumped onto, and flows across, the specimen surface. A fiber (typically 7 m in diameter and between 3.5 to 5 mm long) is immersed into this flowing slurry and oscillated at frequencies around 30-40 kHz to produce a small rotational flow (vortex) that results in the locally accelerated particles. Using such a system, it has been possible, over machining times of 6-24 hours, to produced localized depressions in the surface of a silicon substrate with typical depths of around 60-700 nm and widths of around 10-300 m. Based on these initial studies the material removal rate is estimated to be approximately 40 nm per hour. Using white light interferometry and stylus profilometry the surface deviations (roughness) of these features have a root mean square variation in the region 1-2 nm, which is comparable to that of the surface remote from the machined feature.

The design, construction, and performance of a surface-referenced nanoindentation instrument, termed a precision nanoindentation platform (PNP), are presented. The PNP is a symmetrically designed instrument with a centrally located indenter tip attached to a force cell for measuring the forces between the tip and a specimen. Penetration of the indenter tip into the specimen surface is measured using two proximity sensors placed symmetrically about the indenter. Each proximity sensor is attached to a piezoelectric actuator that is servo controlled to maintain the sensor and the reference frame to which it is attached at a constant height relative to the specimen surface. As the indenter tip penetrates the specimen surface, the movement of the tip relative to the two surface reference frames is measured using capacitance gauges and the average of these displacements is used as a measure of penetration depth. The current indenter is capable of applying indentation forces of up to 150 mN with a noise floor below 2 μN rms for a sampling rate of 1 kHz, and measuring displacement with 0.4 nm rms noise for the same sampling rate. The proximity sensors are capable of maintaining surface height variations of less than 1.0 nm with penetration depths of up to 10 μm. Long-term stability tests indicate a total uncertainty in indentation depth less than 10 nm for periods as long as 12 h. To demonstrate instrument accuracy, repeated indention cycles were performed on a fused silica specimen using incrementally increasing indention force. From this test, an average value of 72 GPa ± 1.5 GPa for the Young's modulus was obtained from the elastic unloading curves for 10 measurements ranging in maximum force from 5 mN to 50 mN. To demonstrate longer-term instrument stability, a poly(methyl methacrylate) specimen was subjected to a fixed 5 mN indentation force for 4 h; two distinct creep-like mechanisms were observed.