TEXT: The information age challenges computer technology to process an exponentially increasing computational load on a limited energy budget 1-3 -a requirement that demands an exponential reduction in energy per operation. In digital logic circuits, the switching energy of present FET devices is intimately connected with the switching voltage [3][4][5] , and can no longer be lowered sufficiently, limiting the ability of current technology to address the challenge. Quantum computing offers a leap forward in capability 6 , but a clear advantage requires algorithms presently developed for only a small set of applications. Therefore, a new, general purpose, 2 classical technology based on a different paradigm is needed to meet the ever increasing demand for data processing.A promising pathway to fast, low voltage classical devices is transduction which is widely used in nature to propagate signals in bioorganisms 7 . When propagating digital logic, we require the input and output signal to be electronic -however, this still allows for an intermediate form In this work we present two physical realizations of the PET concept on an early developmental pathway leading to the fully integrated PET of Fig. 1. The two devices are evolved to generate stress and accomplish an IMT in the PR channel -key for demonstrating the viability of the PET concept. The first approach, Gen-0, uses a millimeter-scale piezoelectric 4 actuator to compress a 50 nm thick PR film, metallize the channel and cycle the transition at kHz frequencies. The second, Gen-1, uses a micron scale, lithographed, piezoelectric pillar to compress a nanoscale, e-beam patterned PR element, enabling cycling at 100-kHz frequencies.The Gen-0 PET generates the stress required to drive an insulator-metal transition in a 50 nm SmSe 18 film where the conducting area is defined by a hole in a silicon nitride layer, as shown in Fig. 2a. A microindenter is utilized as a yoke to provide the counter force against which a commercial piezoelectric actuator compresses and activates conductivity in the SmSe. In operation, a 1 kHz sine wave applied to the actuator with a 20 Vp-p (peak-to-peak) amplitude generates a displacement, resulting in a force on the SmSe element. An On/Off modulation of over three orders of magnitude in PR resistance is generated as illustrated in Fig. 2b Fig. 2b). The Gen-0 PET frequency response is bounded by actuator resonance to 1 kHz (note the small phase shift, due to the mechanical delay, between the applied actuator voltage and the PR response), a limitation removed in the Gen-1 device which employs an integrated micro-actuator.Demonstrating a device with a micro-actuator providing only nanometer sized displacement is key for establishing the viability of the PET concept. The Gen-1 PET, illustrated in Fig. 3a-b, addresses this important challenge. The micro-actuators, fabricated on an 8" silicon wafer, are PE pillars (approximately 2×2×1 µm 3 ), contacted by long leads running on top of patterned PE.Each micro-actuator is flanked by a PE mesh us...

We have developed silicon nanowire based atomic force microscopy probes combining vapor-liquidsolid growth in a custom UHV-CVD with a traditional MEMS processing backend performed at CNF.

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Using site controlled growth of single vapor-liquid-solid silicon nanowires, high aspect ratio tilt-compensated atomic force microscope probes are fabricated on a wafer scale. Methods are developed to sculpt the tips of these probes for desirable performance attributes. Probe performance is explored by imaging high aspect ratio structures using an atomic force microscope. Wafer scale tilt-compensated silicon nanowire probes are an excellent mass producible platform for non-destructive topographic imaging of high aspect ratio features.

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