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We present an evaluation of the hardness and Young's modulus properties of medium pressure sputtered molybdenum disulfide (MoS 2 ) thin films by applying nano-indentation with continuous stiffness method combined with microstructure analysis using small angle x-ray diffraction, Raman, and an electron microscope in scanning and transmission mode. Our results indicate a vertical growth of MoS 2 crystallites with stacking values of 7-laminates along the [0 0 1] direction and an average height of 105 nm, principal Raman vibrations at E 2g 1 at 378 cm −1 and A 1g at 407 cm −1 and an interplanar distance of ~0.62 nm as confirmed by high-resolution transmission electron microscopy. An average hardness of H = 10.5 ± 0.1 GPa and elastic modulus of E = 136 ± 2 GPa from 0 to 90 nm of indenter penetration were found in these investigations.

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