Kingon, A. I.; Nemanich, R. J.; and Cross, J. S., "Direct studies of domain switching dynamics in thin film ferroelectric capacitors" (2005). Alexei Gruverman Publications. 16.

Kingon, A. I.; Nemanich, R. J.; Gruverman, Alexei; and Cross, J. S., "Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors" (2005 This article describes an experimental setup for combined measurements of domain switching dynamics and switching currents in micrometer scale ferroelectric capacitors. The setup is based on a commercial atomic force microscope ͑AFM͒ that is equipped with a piezoresponse mode for domain imaging and with a wide bandwidth current amplifier for switching current recording. The setup allows combined domain/current measurements in capacitors as small as 1 m 2 with switching times resolved down to 10 ns. The incorporation of switching current measurement capability into piezoresponse AFM makes detailed analysis of switching behavior in ferroelectric memory devices possible.

The paper reviews the developments made for designing and fabricating a piezoelectric driven actuator and its integration into coplanar wave guide (CPW) microwave structures. In the first part of this work the electromechanical properties of different lead–zirconate–titanate (PZT) thin films are investigated. A modified precursor route for chemical solution deposition (CSD) is introduced to minimize the thermal budget of the PZT by maintaining its superior piezoelectric properties. The second part deals with the fabrication of a piezoelectric driven actuator for use in RF switching applications. Advantages of bulk and surface micromachined devices are compared and a suitable actuator design is proposed. Based on these results, a piezoelectrically actuated shunt switch for use in CPW devices is developed and optimized, and the concept is confirmed by measurements. Finally, novel reconfigurable CPW band‐pass filters are presented, which demonstrate the usefulness of the developed shunt switches in microwave applications. Microwave switch Distribution of surface current density (background), image of copper contact (top) and micro switch schematic (bottom).