Articles you may be interested inPotassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching J.Maximum achievable aspect ratio in deep reactive ion etching of silicon due to aspect ratio dependent transport and the microloading effect Bosch type processes have been employed to fabricate nanostructured Si surfaces. Nanopillars and nanocones in Si have been fabricated using different techniques for Ni micromasking. Plasma redeposition of Ni was found to be responsible for Si pillar formation with diameters varying in the submicron range. A possibility to produce tilted nanopillars with tilt angles up to as high as 25°has been demonstrated. In other method, previously deposited and annealed thin Ni films were employed. Smaller Ni nanoislands were obtained, and the formation of Si nanocones was demonstrated using longer passivation steps. In this case, reflection coefficients as low as 1.2% were obtained for the optimized etching process time.
This study aims to conduct a systematic review of the literature through bibliometrics and content analysis to raise barriers, data agenda, and a framework to support academics and practitioners of fractional calculus in transport phenomena from the perspectives of food engineering. The structure of the methodological procedure is a selection of studies in the research area, statistical analysis of the data, and content analysis. The Bibliometrix package of software R was used in the bibliometric analysis, being fundamental for the organization of the discussions. Finally, the food engineering area researchers can use the questions, barriers, and research agenda in fractional calculus to solve problems in the studied clusters' processes. Based on the previous knowledge of the researcher, a path was provided to follow the data agenda and the proposed framework, identify insights, and solve a specific problem. As the main contribution, this study presents several applications and the most significant barriers and presents bibliometrics quantifying the theoretical and empirical studies in the area. Nonetheless, this study places the research field of fractional calculus for Food Engineering, Science, and Technology, presenting several applications and the most significant barriers quantifying the theoretical and empirical studies in the area. As a practical contribution, this study presents a research agenda and a framework that can contribute to practitioners applying fractional calculus in process control.
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