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This paper presents a new self-compensated thermocycler for polymerase chain reaction (PCR), especially used in DNA amplification process requiring precise thermal control. A new design of microheaters to improve the thermal uniformity of the PCR chamber using array-type heaters and a selfcompensated mechanism is reported. The feature of this design is that structure change or active thermal compensation is not required. Experimental data show that the spatial variation of temperature distribution is less than 1°C in the PCR chamber at annealing temperature. Besides, the area with thermal variation less than 0.5°C is close to 90% of the working area.

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