The properties of a new aqueous-base-develop, negative-tone photosensitive polynorbornene have been characterized. High-aspect-ratio features of 7:1 (height:width) were produced in 70-lm-thick films in a single coat with straight side-wall profiles and high fidelity. The polymer films studied had contrast of 12.2 and low absorption coefficient. To evaluate the polymerÕs suitability to microelectronics applications, epoxy crosslinking reactions were studied as a function of processing condition through Fourier-transform infrared spectroscopy, nanoindentation, and dielectric measurements. The fully crosslinked films had an elastic modulus of 2.9 GPa and hardness of 0.18 GPa.

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