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Flexible microdischarge arrays have been fabricated in metal–polymer–metal structures having a total thickness of ∼30 μm (∼1.2 mils). Composed of individual cylindrical devices having a diameter of 150 μm, positive differential resistance (30–120 kΩ), and operating voltages as low as 114 V for a 5 μm thick dielectric layer, the arrays operate at pressures beyond 700 Torr of Ne and in 1 atm of air. For Ne pressures ⩽ 200 Torr, emission is produced from Ne ion excited states lying more than 55 eV above the neutral ground state (2p6). The structures reported here are inexpensive to fabricate and have lifetimes beyond 50 h. Arrays that have been sealed by conventional lamination have also been operated successfully.

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A little more than two decades after the introduction of the first microcavity plasma devices, a growing body of commercial products based on the remarkable properties of these low-temperature, atmospheric plasmas is now available. Following a brief review of early microplasma lamp development, this article describes microplasma-based devices and systems currently being manufactured for applications in photolithography, photopatterning, and other nanofabrication Plasma Process Polym. 2022;e2200075 www.plasma-polymers.com

Laser spectroscopy, rotational assignment, and perturbation analysis of the A 1Σ+ u -X 1Σ+ g Ca2 red system J. Chem. Phys. 85, 3749 (1986); 10.1063/1.450948 Spectroscopic identification of the lowest rotation-vibration levels of the (2pσ)2 F 1Σ+ g state of the D2 molecule J. Chem. Phys. 85, 2384 (1986); 10.1063/1.451093 Spectroscopic identification of the lowest rotationvibration levels of the (2pσ)2 F 1Σ+ g state of the H2 molecule J. Chem. Phys. 83, 962 (1985); 10.1063/1.449423An analysis of the A 1Σ u +-X 1Σ g + band system of 7Li2Rotationally resolved transitions from the metastable 4sa a3~: state of Ar z to the 7 pa 3~; state have been observed by laser excitation spectroscopy in a pulsed corona discharge. Laser induced fluorescence spectra for the 7 pa 3I + +-a 3 I: transition observed near 19 530 cm -I have led to the first resolved triplet splittings and 8rotational analyses for Rydberg-Rydberg transitions in Arz. Analyses for the (0-0), (0-1), (1-0), and (1-1) bands of7pa+-a are presented here. Bands with v' =2 are observed for this system but exhibit no rotational structure and bands with v '>2 are not observed, indicating that the predissociation lifetimes of these upper levels fall rapidly for v' > 1.Data presented lead to rotational energies and molecular constants for the a 3 I: and tpa 3I;states, including the effective rotational constant Be which is determined to be 0.1412 cm-I and 0.1345 cm-I for the 4sa a 3 I: and tpa 3~; states, respectively. Results are compared to ab initio and other calculations, and combined with existing data to produce experimental estimates of Do and De for the a 3 I: state of 5700±200 cm-I and 5850±200 cm-I , respectively. dimer involved the initial fonnation of Arz aJ'!: metagtableg J.