We investigated the tuning efficiency of electrostatically actuated multiple air-gap filters fabricated in InP for dense wavelength division multiplex applications by comparing measured tuning curves with the results of optical and mechanical simulations. These filters exhibit a record tuning range of 127 nm at 7.3 V tuning voltage. The filters were measured in reflection using standard single mode fiber. The subsequent analysis is based on a one-dimensional electromechanical and optical model providing a reasonable estimation for the pull-in voltage. Optical simulations show that the filter linewidth does not affect the tuning efficiency.
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