Record tuning range of InP-based multiple air-gap MOEMS filter

Daleiden, J.; Rangelov, V.; Irmer, S.; Römer, Engelina; Strassner, A.; Prott, C.; Tarraf, A.; Hillmer, Hartmut

doi:10.1049/el:20020872

Cited by 24 publications

(15 citation statements)

References 7 publications

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“…[105][106][107] An even larger refractive index difference can be obtained using DBRs with air gaps between semiconductor layers. [108,109] Only three pairs of reflectors are needed. High-index-contrast DBRs also have broader reflection band- width.…”

Section: Tunable Filtersmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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Section: Tunable Filtersmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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“…L p ϭ/(4•⌬n). 27 The refractive index difference ⌬n between the layers is essential for the design of highly reflective DBRs. It strongly influences the required number of periods for a certain reflectance.…”

Section: Bragg Mirrorsmentioning

confidence: 99%

Wide and continuous wavelength tuning of microcavity devices for optoelectronic applications

Daleiden

Tarraf

Irmer

et al. 2003

J. Micro/Nanolith. MEMS MOEMS

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Ultra-widely tunable microcavity devices implemented by surface micromachining are studied. We model, fabricate, and characterize 1.55-m vertical-resonator-based optical filters and vertical cavity surface emitting lasers (VCSELs) capable of wide, monotonic, and kink-free tuning by a single control parameter. Our devices are comprised of single or multiple horizontal air gaps in the dielectric and InP-based material system. Distributed Bragg mirrors with multiple air gaps are implemented. Due to the high refractive index contrast between air (nϭ1) and InP (nϭ3.17), only three periods are sufficient to guarantee a reflectivity exceeding 99.8% and offer an enormous stop-band width exceeding 500 nm. Unlike InGaAsP/InP or dielectric mirrors, they ensure short penetration depth of the optical intensity field in the mirrors and low absorption values. Stress control of the suspended membrane layers is of utmost importance for the fabrication of these devices. By controlling the stress, we are able to fabricate InP membranes that are extremely thin (357 nm thick) and at the same time flat (radius of curvature above 5 mm). Micromechanical single parametric actuation is achieved by both thermal and electrostatic actuation. Filter devices with a record tuning more than 142 nm with 3.2 V are presented.

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“…Air with a refractive index of unity and a very low loss is a perfect choice for the low-index material, improving the optical contrast by about 50% in the UV-Visible range [1]. Daleiden et al [2] presented an air/dielectric DBR for tunable wide stopband infrared Fabry-Perot interferometers (FPI). Silicon-airgap FPIs with a single air-gap per DBR were also implemented by [3,4] for extending the operating range of a micro-spectrometer.…”

Section: Introductionmentioning

confidence: 99%