No abstract

No abstract

Ultrasonic assisted lapping (USAL) is proposed as a cost-effective alternative to micro-system based tcchnologies, such as lithography, etching, and electron or ion beam micromachining, for manufacturing high surface quality and complex microstructures.The chosen target materials in this research are silicon, glass and advanced ccramics, which are hard-brittle and are not diamond turnable. First this paper describes the principles of USAL for microstructures, fo}lowed by obstacles in irnplementing and using the technique. Then, a path-controlled USAL system with an integrated on-line monitoring AE (Acoustic emission) system is presented. To evaluate the feasibility ofthe proposed technique, machining experiments were conducted to fabricate linear, spiral and other 2-D arbitrary pattems using a 50pm carbide tool. Further experimental results focus on the achievable surface roughness and observed tool wear as well as on improving the surface roughness by reducing the material removal unit.