An ultrasonic travelling wave micro-fluid driving model was presented. Principle of the driving model was introduced and finite element model was developed. Resonance frequencies were predicted by modal analysis. Fluid structure coupling analysis was done to observe the transient fluid velocity. The time-averaged velocity was calculated. Influences of driving voltage, driving frequency and fluid viscosity on time-averaged velocity were taken into accounted. The results indicate that the time-averaged velocity profile is asymmetric parabola and is influenced by the driving frequency obviously. The maximum time-averaged velocity decreases with the increasing of fluid viscosity and reflux appears when the fluid viscosity reaches to 0.07Pa·s.

The generation method of traveling wave and the driving force source in straight micro channel were investigated based on the vibration theory. The analysis shows that the driving force in traveling wave micro-pump is closely related to the fluctuations of the channel wall and there is traveling standing wave along the straight micro channel. Through fluid-structure coupling analysis, flow characteristics in straight micro channel are obtained as well as the outlet velocity. The average outlet velocity is about several hundreds of nanometers percent second if only the mechanical force is considered. The influence of the driving voltage on the velocity is also analyzed to provide guidance on the optimal design of the traveling wave micro-pump.

A new ultrasonic peristaltic micro-fluid driving model was presented on the principle of ultrasonic traveling wave and volume displacing mechanism. First, driving principle of the model was introduced and finite element model was developed. Second, the transient dynamics analysis was performed to observe the chambers traveling and the fluid flowing. What’s more, harmonic analysis was done to get its amplitude-frequency response characteristics. Third,the coupling modes filled with fluid was performed to prove its drivng effect. This can provide a guidance for furture fluid structure analysis to get better performance and efficiency.