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To meet the dual requirement of high flow rate and high output pressure in water-cooling system of electronic chip, a quintuple-bimorph tenfold-chamber piezoelectric pump (QTPP) is presented, which owns the comprehensive advantages of parallel and serial connection. QTPP is composed of two groups of five-chamber-in-series, and the two groups of five-chamber-in-series can be in parallel or serial. QTPP is designed and fabricated, the output performance of which is invested by experiments. The experimental results show that QTPP can obtain high flow rate and high output pressure under low driving voltage. When driven by quintuple piezoelectric vibrators under 60Vpp, QTPP in parallel can obtain the maximum flow rate of 251.1ml/min and the maximum output pressure of 60.2kPa. While in serial, QTPP can obtain 186.2ml/min and 109.9kPa respectively. The water-cooling system with QTPP is established and experimented. The experimental results indicate that the water-cooling system with QTPP can achieve a good cooling performance under low driving voltage. Under the driving voltage of 60Vpp, QTPP can reduce the temperature of stimulate chip from 107.8℃ to 51℃.

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A piezoelectric micro gas compressor with parallel-serial hybrid chambers (PMGCPS) is presented, which consists of two compression stages of stage I and stage II. The stage I is composed of two piezoelectric driving units connected in parallel, while stage II is composed of a piezoelectric driving unit, forming an integral tower compression structure. Based on the tower compression structure, the PMGCPS owns the dual advantages of large flow rate and high output pressure. The prototype of PMGCPS is designed and manufactured. The driving frequency and voltage characteristics of PMGCPS are experimented. Under the driving frequency of 300 Hz and the driving voltage of 300 Vpp, the maximum flow rate and output pressure of PMGCPS is 795.6 mL/min and 13.4 kPa, respectively. PMGCPS provides new ideas for the further development of piezoelectric micro gas compressor.