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D N ) generates summary data, and then WEB will highlight issue and provide input suggestion base on pre-defmed rule. Abstract -Test Wafers are used in wafer fabrication to monitor equipment stability andproduct quality. Any shortage will cause the loss of equipment capacity and production move. On the contrary prepare more test wafers to avoid shortage will spend more cost, occupy more storage space, and lower transfer eficiency. Considering the wafer cost and FAB productiviw, an eficient control system of test wafer in 300 mm FAB is much more important than formerly. *=.I4 ,.,hXlpi, -wl. l b . e=,,

This paper purpose is to improve the turn rate of "pilot lot" to shorten new product development time. These lots belong to the R&D department. We call these lots as R&D lots. In order to push these lots shorter than production lots, we construct a virtual mini-line in already existing production line to satisfy production output requirement for manufacture department and new product pilot run requirement for R&D department. After the miniline system released, we got good results. Our Technology development cycle time in super hot lot/hot lot improved 10.6% and 11.9% respectively than before.

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