Various kinds of high quality optical bers are routinely fabricated by the modi ed chemical vapor deposition (MCVD), in which ne particles are generated through the oxidation of chemical precursor and deposited in a silica tube reactor. Ef ciency, rate, and uniformity of particle deposition determine the quality and cost of optical bers; therefore efforts to enhance aerosol deposition performance should be important for further improving both quality and cost. Here we propose a jet assisted aerosol chemical vapor deposition method utilizing gas jets in the conventional MCVD silica tube reactor for the purpose of enhancing the ef ciency, rate, and uniformity of particle deposition. High temperature helium gas is injected radially through an electrically heated thin tube inserted inside the silica tube. High temperature gas jets push particles generated in a tube toward the tube wall and therefore shorten the axial length of particle trajectories before deposition and cause particles to experience higher thermophoretic force. As a result, deposition ef ciency (and rate) was found to considerably increase compared to the conventional method, and the uniformity was also signi cantly improved.

Aerosol CVD has been extensively utilized to manufacture high-quality optical fibers in which multicomponent aerosols are generated and deposited. Our earlier study proposed a jet-assisted aerosol CVD in which high-temperature internal jets were used inside a conventional silica tube reactor of a modified (M)CVD method, and showed the enhancement of deposition performance for single component SiO 2 particle deposition. In the present study, we apply this method to the deposition of multicomponent particles and demonstrate that our method of jet-assisted aerosol CVD not only significantly improves overall particle deposition efficiency, but also enhances the uniformity of composition of multicomponent SiO 2 /GeO 2 particle deposition. The existence of an optimum jet flow rate for the maximum deposition efficiency has been found. A nitrogen jet has also been used and found to produce almost the same improvement for particle deposition performance as in the case of a helium gas jet.