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A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

This investigation proposes a successful case of industrial-academic cooperation between the Chienkuo Technology University and J. King Aluminum Inc. This study was proposed by the rotating machinery and heat transfer laboratory. They studied the optimal heat transfer and structural strength of closed-cell aluminum porous material. The cooperation involved the exchange of technical skills; the determination of policies and methods for establishing a lasting relationship, to ensure mutual trust between the parties involved and the elucidation of the benefits enjoyed by both sides. This study seeks to provide a good example to local technical industrial institutions of successful industrial-academic cooperation to promote academic professional research and the establishment of empirical formulae from relevant experimental data. The results of the example are useful in designing an electronic package and cooling device will lead to the novel material applications and reduce the cost of research in related industries, improving global production and marketing, also motivates students to combine academic skills and industrial practice as part of a professional education