The optical property of multi-layer dielectric thin film is determined by its operation on the more or less complete cancellation of the light reflected at the upper and lower of the multi-layer interface of the thin film. An enhanced, numerically stable transmittance matrix approach based on rigorous coupled-wave analysis (RCWA) is applied to the analysis of optical character for multi-layer dielectric thin film. A design of a thin film stack used in multi-lay dielectric grating was presented by using the method of RCWA. The numerical calculation shows that RCWA is a relatively straightforward and deterministic technique for analysis the optical property of multi-layer dielectric thin film.

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