High diffraction efficiency for multi-layer dielectric gratings with rectangular groove

Kong, Weijin; Yun, Maojin; Ling, Cuichun; Sun, Xin; Shao, Jianda; Fan, Zhengxiu

doi:10.1117/12.792247

Cited by 1 publication

(1 citation statement)

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“…The PCG should satisfy the requirements of high diffraction efficiency (DE), high laser-induced damage threshold (LIDT), and wide bandwidth. The multilayer dielectric grating (MDG) [3][4][5][6][7][8][9][10] has a flexible design and high DE [11] based on interference theory and surface relief diffraction principles. Thus, MDGs which also provide high LIDT values [12] are widely adopted in CPA systems.…”

Section: Introductionmentioning

confidence: 99%

Broadband trapeziform multilayer dielectric grating for femtosecond pulse compressor: design, fabrication, and analysis

Guan¹,

Jin²,

Liu³

et al. 2013

Laser Phys.

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Rectangular HfO 2 grating fabrication is difficult, so a trapeziform multilayer dielectric pulse compression grating (PCG) has been designed using a genetic algorithm and the Fourier mode method. Simulation results show that a greater than 120 nm wavelength range multilayer dielectric grating (MDG) is obtained with a minus-first-order diffraction efficiency (DE) exceeding 95%. The bandwidth is 136 nm with the minus-first-order DE exceeding 90%. The trapeziform structure shows good tolerances for grating fabrication. The multilayer dielectric is deposited by e-beam evaporation, then the MDG is fabricated by reactive ion beam etching. A 128 nm bandwidth of the MDG for the transverse electric polarization with an efficiency exceeding 90% is obtained, and the maximum DE can reach up to 98.3%. The trapeziform MDG is an ideal PCG for chirped pulse amplification systems with high DE, broad bandwidth and good fabrication tolerances. Laser-induced damage thresholds of 0.53 J cm −2 under 40 fs pulses are experimentally reached with very high and uniform efficiency.

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