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Resonant grating-waveguide structures formed with InP/InGaAsP semiconductor materials were tested to show light modulation at a wavelength of 1.55 microm. Narrow, subnanometer resonant spectral bandwidths and a ratio of ref lected intensities between resonance and away from resonance of greater than 50 were measured. For a resonant structure with an area of 3 mm x 3 mm, the modulation frequency reached 5 MHz.

Under certain conditions grating/waveguide structures have a resonant behavior with narrow spectral bandwidths. Several such structures were designed, fabricated, and evaluated, demonstrating resonances with narrow spectral bandwidths ranging to as low as 0.035 nm at full width at half maximum. These can be exploited as compact spectral filters having high finesse.

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