No abstract

An autoniatised system for anrrlyzirig the electron topography of u condiictirig sir face (setiiicondirctors, metals, fetntes or condiictor ceratiiics) is represented. The fiinction of the system is bused on the recently observed sir face photo-charge effect. The investigation is express and contactless. The systeni allows vbralisations of different formations on the sirrfctce such as defects, ion-iniplanted areas, etc. on a conipirter screen. 17ie stntctirre of the system is described. The results from investigations with Gap and Cii are reported.