Air-coupled capacitance transducers have been manufactured using anisotropically etched silicon backplates and commercially available dielectric films (Kapton and Mylar). The small backplate pits which result from etching, provide well ordered and highly uniform air layers between the backplate surface and thin dielectric film. Such uniformity allows the transducers to be manufactured with reproducible characteristics (a property difficult to achieve through conventional manufacturing). Impulse response studies in generation and detection, have indicated well-damped, wideband behavior, with bandwidths extending from <100 kHz to 2.3 MHz (at the 06 dB points). These bandwidths are investigated as a function of excitation pulse width, applied bias potential, and dielectric film thickness. An estimate of detection sensitivity is also provided by comparison with a calibrated laser interferometer.

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An entirely air-coupled inspection system using a pair of micromachined silicon capacitance transducers has been used to image defects in thin plates of different materials (0.7 mm to 2.22 mm thick) using air-coupled Lamb wave tomography. A filtered back projection algorithm was used in a form of difference tomography to reconstruct images of defects up to 10 mm diameter machined in aluminium and perspex (Plexiglas) plates, as well as in samples of carbon fiber reinforced polymer (CFRP). The technique was able to resolve non-central defects as well as multiple flaws within the scan area. This flexible tomographic system was able to produce images of the change in a variety of different acoustic variables from only one set of experimental data, with success dependent on the size, shape, and location of the defect in the scan area.

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