Lasers with hertz linewidths at time scales of seconds are critical for metrology, timekeeping, and manipulation of quantum systems. Such frequency stability relies on bulk-optic lasers and reference cavities, where increased size is leveraged to reduce noise but with the trade-off of cost, hand assembly, and limited applications. Alternatively, planar waveguide–based lasers enjoy complementary metal-oxide semiconductor scalability yet are fundamentally limited from achieving hertz linewidths by stochastic noise and thermal sensitivity. In this work, we demonstrate a laser system with a 1-s linewidth of 1.1 Hz and fractional frequency instability below 10 −14 to 1 s. This low-noise performance leverages integrated lasers together with an 8-ml vacuum-gap cavity using microfabricated mirrors. All critical components are lithographically defined on planar substrates, holding potential for high-volume manufacturing. Consequently, this work provides an important advance toward compact lasers with hertz linewidths for portable optical clocks, radio frequency photonic oscillators, and related communication and navigation systems.

High-fidelity photodetection enables the transfer of the low noise inherent to optical oscillators to the microwave domain. However, when photodetecting optical signals of the highest timing stability, photodiode flicker (1/f) noise can dominate the resulting timing jitter at timescales longer than ~1 ms. With the goal of improving femtosecond-level timing fidelity when transferring from the optical to microwave domain, we vary the duty cycle of a train of optical pulses and show that the photodetector flicker phase noise on a photonically generated 1 GHz microwave signal can be reduced by ~10 dB under ultrashort pulse illumination, reaching as low as -140/f dBc/Hz. In addition, a strong correlation between amplitude and phase flicker noise is found, implying a single baseband noise source can modulate both quadratures of the microwave carrier. These findings expand the limits of the ultimate timing stability that can be transferred from optics to electronics.

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