We observed strong band edge luminescence at 8.5–200 K from 200–880 nm thick InN films grown on 10 nm thick InN buffer layers on Si(001) and Si(111) substrates by electron cyclotron resonance-assisted molecular beam epitaxy. The InN film on the Si(001) substrate exhibited strong band edge photoluminescence (PL) emission at 1.814 eV at 8.5 K, tentatively assigned as donor to acceptor pair [DAP (α-InN)] emission from wurtzite-InN (α-InN) crystal grains, while those on Si(111) showed other stronger band edge PL emissions at 1.880, 2.081 and 2.156 eV, tentatively assigned as donor bound exciton [D0X(α-InN)] from α-InN grains, DAP (β-InN) and D0X (β-InN) emissions from zinc blende-InN (β-InN) grains, respectively.

For the first time, we observed strong band-edge photoluminescence at 1.814 eV, and two stronger emissions at 1.880 and 2.081 eV at 8.5 K from the respective 880 nm thick InN heteroepitaxial layers (heteroepilayers) with 10 nm thick InN buffer layers grown on Si(001) and Si(111) substrates by electron cyclotron resonance-assisted molecular beam epitaxy. The former was probably assigned as donor-to-acceptor pair (DAP(a-InN)) emission from wurtzite-InN (a-InN) crystal grains, the latter were assigned as donor bound exciton (D 0 X(a-InN)) emission, and D 0 X(b-InN) or DAP(b-InN) emission from zincblende-InN (b-InN) crystal grains, respectively. Substrate annealing before growth and the introduction of a buffer layer had strong influences on the crystal structure and crystalline quality of the initial InN heteroepilayers.

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