This paper reports on the implementation of an interface ASIC for MEMS vibratory gyroscopes exhibiting a wide tuning range from 7 to 31 kHz with a power consumption of 1.6 mW and a dynamic range of 92 dB over a signal band of 40 Hz. The drive loop of the system employs a high voltage stage based on flying capacitors for the excitation of the drive mass allowing a startup time of 44 ms. For the detection of the Coriolis signal, a fourth-order closed-loop electromechanical sense loop deploying continuous-time (CT) circuit techniques and -modulation is implemented. The sense loop deploys a high-Q electronic resonator based on gm-C circuits and a collocated charge-integrator for signal readout and for generating feedback forces. The readout interface with an active circuit area of 2.42 mm 2 is fabricated in a 0.35 μm CMOS technology with a HV-module. The ASIC achieves a noise floor of 0.007 • /s/ √ Hz over 40 Hz while the full-scale range is higher than ±1400 • /s and the bias stability measures 2.6 • /h. The wide tuning capability of the ASIC is demonstrated on the basis of two tested MEMS gyroscopes for different applications with an equal ASIC performance.
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