This paper reports on the deposition and characterization of piezoelectric AlN and AlXSc1-XN layers. Characterization methods include XRD, SEM, active thermo probe, pulse echo, and piezometer measurements. A special focus is on the characterization of AlN regarding the mechanical stress in the films. The stress in the films changed between -2.2 GPa (compressive) and 0.2 GPa (tensile) and showed a significant dependence on film thickness. The cause of this behavior is presumed to be the different mean grain sizes at different film thicknesses, with bigger mean grain sizes at higher thicknesses. Other influences on film stress such as the sputter pressure or the pulse mode are presented. The deposition of gradient layers using those influences allowed the adjustment of film stress while retaining the piezoelectric properties.

It is well known that dropwise condensation corresponds to a high heat transfer coefficient. The high performance enhancement of dropwise condensation in comparison to filmwise condensation is attributed to the ability of non-wetting droplets to be shed from the surface by gravity, therefore reducing the overall thermal resistance. The common treatments to carry out the hydrophobic surface for dropwise condensation are coating and structure. The improvement of heat transfer efficiency by combination of surface treatments with coating and groove structure has been proved compared of surface with single surface treatment by coating or groove structure. Based on this result, in this study presents a model developed to predict the heat transfer efficiency of dropwise condensation for surface with coating and groove structure features. The model is established by heat transfer though a single droplet with the drop size distribution. The heat transfer of single drop is not only analyzed as combination of thermal resistances, but also considered capillary effect of droplet due to groove geometry and properties of surface. In addition, the model results are validated with experimental data which is investigated by varied modification of vapor side metallic surface properties at low absolute pressure. It can be a reference to design industrial condensers of heat exchangers in the future. Further to optimize the surface properties and improve the higher heat transfer performance of dropwise condensation

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We investigated the potential of the aluminum nitride films to excite ultrasonic waves at frequencies [50 MHz. The deposition process of the aluminum nitride thin film layers on silicon substrates was investigated and optimized regarding their piezoelectric behavior. Large single element transducers were deposited on silicon substrates with aluminum electrodes, under different parameters for the magnetron sputter process, like pressure and bias voltage. Special test setup and a measuring station were created to characterize the sensors. Acoustical measurements were carried out in pulse echo mode up to 500 MHz and the values of piezoelectric charge constant (d 33 ) were determined. As a result, two parameter sets were found for the sputtering process to obtain an excellent piezoelectric charge constant of about 7.2 pC/N maximum. Then the sputtering process with these parameters was used to deposit sensors on various substrate materials and with different electrode sizes.

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