Computed laminography (CL) was developed to use X-rays from synchrotron sources for high-resolution imaging of the internal structure of a flat specimen from a series of 2-D projection images. The projections are acquired by irradiation of the sample under different rotation angles where the object rotation axis is inclined with respect to the beam direction. This yields for laterally extended objects a more uniform average transmitted intensity during sample rotation compared with computed tomography (CT). The reconstruction problem of CL cannot be reduced to a data-efficient 2-D case (as for parallel-beam CT) since each single slice perpendicular to the rotation axis requires a 2-D region on the detector as input data for all projection directions. This paper describes a computationally efficient reconstruction procedure based on filtered backprojection (FBP) adapted to the CL acquisition geometry. From the Fourier slice theorem, we derive a framework for analytic image reconstruction and outline implementation details of the generic FBP algorithm. Different approaches reducing the reconstruction time by means of parallel and distributed computations are considered and evaluated.

Correlated x-ray diffraction imaging and light microscopy provide a conclusive picture of three-dimensional dislocation arrangements on the micrometer scale. The characterization includes bulk crystallographic properties like Burgers vectors and determines links to structural features at the surface. Based on this approach, we study here the thermally induced slip-band formation at prior mechanical damage in Si wafers. Mobilization and multiplication of preexisting dislocations are identified as dominating mechanisms, and undisturbed long-range emission from regenerative sources is discovered.

Synchrotron radiation laminography with X-ray diffraction contrast enables three-dimensional imaging of dislocations in monocrystalline wafers. We outline the principle of the technique, the required experimental conditions, and the reconstruction procedure. The feasibility and the potential of the method are demonstrated by three-dimensional imaging of dislocation loops in an indent-damaged and annealed silicon wafer.

Abstract:Synchrotron laminography is combined with Talbot grating interferometry to address weakly absorbing specimens. Integrating both methods into one set-up provides a powerful x-ray diagnostical technique for multiple contrast screening of macroscopically large flat specimen and a subsequent non-destructive three-dimensional (3-D) inspection of regions of interest. The technique simultaneously yields the reconstruction of the 3-D absorption, phase, and the so-called dark-field contrast maps. We report on the theoretical and instrumental implementation of of this novel technique. Its broad application potential is exemplarily demonstrated for the field of cultural heritage, namely study of the historical Dead Sea parchment.