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We report the realization of a spatial and spectrally tunable air-gap Fabry-Pérot type microcavity of high finesse and cubic-wavelength-scale mode volume. These properties are attractive in the fields of opto-mechanics, quantum sensing and foremost cavity quantum electrodymanics. The major design feature is a miniaturized concave mirror with atomically smooth surface and radius of curvature as low as 10 µm produced by CO 2 laser ablation of fused silica. We demonstrate excellent mode-matching of a focussed laser beam to the microcavity mode and confirm from the frequencies of the resonator modes that the effective optical radius matches the physical radius. With these small radii, we demonstrate sub-wavelength beam waists. We also show that the microcavity is sufficiently rigid for practical applications: in a cryostat at 4 K, the root-mean-square microcavity length fluctuations are below 5 pm.

We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of curvature < ∼ 5 µm at shallow depth and low surface roughness of 2 Å. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structures within a tunable Fabry-Pérot type microcavity, demonstrate near-coating-limited loss rates (F = 25 000) and small focal lengths consistent with their geometrical dimensions.

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