2017
DOI: 10.1063/1.4973458
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Fabrication of mirror templates in silica with micron-sized radii of curvature

Abstract: We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of curvature < ∼ 5 µm at shallow depth and low surface roughness of 2 Å. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structures within a tunable Fabry-Pérot type… Show more

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Cited by 33 publications
(24 citation statements)
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“…Tunable Fabry-Perot resonators [146][147][148][149][150][151] consist of two parts: the sample which consist of a planar back DBR as well as a part of the cavity containing the QDs and the curved top DBR which is either fabricated into the tip of a fiber [146,147,151] or a glass template. [148][149][150] Therefore, they allow to easily tune the resonator frequency by changing the distance between bottom part and top part. Moreover, by moving the bottom part and top part relative to each other in lateral direction, it is possible to spatially align any QD in the bottom part with the resonator mode.…”
Section: Tunable Fabry-perot Resonatorsmentioning
confidence: 99%
“…Tunable Fabry-Perot resonators [146][147][148][149][150][151] consist of two parts: the sample which consist of a planar back DBR as well as a part of the cavity containing the QDs and the curved top DBR which is either fabricated into the tip of a fiber [146,147,151] or a glass template. [148][149][150] Therefore, they allow to easily tune the resonator frequency by changing the distance between bottom part and top part. Moreover, by moving the bottom part and top part relative to each other in lateral direction, it is possible to spatially align any QD in the bottom part with the resonator mode.…”
Section: Tunable Fabry-perot Resonatorsmentioning
confidence: 99%
“…Laser-ablated surfaces tend to be somewhat non-spherical, however, which can lead to mode-coupling loss [ 84 ] and polarization-dependence [ 85 ]. Moreover, control over the morphology, especially the relationship between feature depth and ROC, requires additional processing steps [ 86 ].…”
Section: Fpcs For Cavity Quantum Electrodynamics Applicationsmentioning
confidence: 99%
“…Laser-ablated surfaces tend to be somewhat non-spherical, however, which can lead to mode-coupling loss [82] and polarization-dependence [83]. Moreover, control over the morphology, especially the relationship between feature depth and ROC, requires additional processing steps [84].…”
Section: Chip-based Fpcs For Cqedmentioning
confidence: 99%