Stereolithography can be used to fabricate 3-D and high aspect ratio microstructures with low manufacturing cost and short fabrication time. Stereo lithography can customize the packages for microfluidics and microsensors to eliminate the dead volume of the reaction chamber. Fabrication of MEMS packages on a wafer level scale can decrease the manufacturing time and assembly time. In order to show the feasibility of integration of stereolithography with micromachined devices, alignment, cleaning, and dicing tests have been investigated. Stereolithography was applied to chemical sensors, interdigitated electrodes, and an AFM cantilever fluid cell package. After the cleaning process the devices were tested and passed a functional test.

This work has undergone a double-blind review by a minimum of two faculty members from institutions of higher learning from around the world. The faculty reviewers have expertise in disciplines closely related to those represented by this work. If possible, the work was also reviewed by undergraduates in collaboration with the faculty reviewers. AbstractMicrofluidics devices have high importance in fields such as bioanalysis because these devices have the ability to manipulate small volumes of fluid, typically ranging from microliters to picoliters. Small samples of fluids can be quickly and easily tested using reactions performed with complex microfluidic devices. Many methods have been previously developed to create these devices, including traditional nano-lithography techniques borrowed from the field of microelectronics. However, these traditional techniques are cost-prohibitive for many small-scale laboratories. This research explores a relatively low-cost technique using a 3D printed master, which is used as a template for the fabrication of polydimethylsiloxane (PDMS) microfluidic devices. The masters are designed using computer aided design (CAD) software and can be printed and modified relatively quickly. We have developed a protocol for creating simple microfluidic devices using a 3D printer and PDMS adhered to glass. We have also explored methods to overcome the size-limits of the 3D-printed master templates by using shrinkable polymers and modified channel geometries to create a flow-focusing channel. This relatively simple and lower-cost technique can now be scaled to more complicated device designs and applications.