Fabricated by femtosecond laser pulses at wavelength λ of 780nm, the feature size of two-photon polymerization using SCR500 was reduced to λ∕50. Lines with sub-25-nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700μm∕s. Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼15nm, which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.

We present new methods to produce polymerized nanotips via two-photon photopolymerization. By gradually changing the laser power, we fabricate a single polymerized tip with the size of 120nm. When two rectangle anchors with protuberances are close enough, lines with the slimmest part of about 20-30nm and tips with the widths of about 35nm are produced between anchors, which are the best resolution obtained with the resin SCR-500 to our knowledge. As the tips are adhered to larger polymerized structures, they can survive post processing in spite of their small sizes.

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