Polymerized nanotips via two-photon photopolymerization

Abstract

We present new methods to produce polymerized nanotips via two-photon photopolymerization. By gradually changing the laser power, we fabricate a single polymerized tip with the size of 120nm. When two rectangle anchors with protuberances are close enough, lines with the slimmest part of about 20-30nm and tips with the widths of about 35nm are produced between anchors, which are the best resolution obtained with the resin SCR-500 to our knowledge. As the tips are adhered to larger polymerized structures, they can survive post processing in spite of their small sizes.

Three-dimensional micro-/nano-structuring via direct write polymerization with picosecond laser pulses

“…Photopolymerization by direct write [1] has demonstrated fabrication of complex 3D and 2D objects of dimensions required for practical applications with feature sizes ranging from tens-of-nanometers to micrometers and has proven efficient despite being a serial method [2][3][4]. The strength of this method is reflected by the following key features: a possibility to make 3D complex objects with no geometrical restrains [5], to reach resolution on a molecular scale [6,7], to structure flexible materials accessing tunability of refractive index [8], to apply it to biocompatible [9] and biodegradable polymers [10], to mention some of promising directions. Building functional structures by direct laser write over large areas with micro/nanoscale resolution of different materials [11] with integration of optical functions [12] opens an opportunity to apply this technology for practical uses and, in some applications, challenge established lithographic technologies.…”

3D Micro-Optics Via Ultrafast Laser Writing: Miniaturization, Integration, and Multifunctionalities

“…Since thermal processes are very efficient in chemical modifications of materials, by tuning a photoexcitation with a controlled thermal activation the materials' processing is acquiring new functionalities when femtosecond laser pulses with tens-of-megahertz repetition rate are used [18,20,21,[42][43][44][45][46]. The photopolymers are photosensitized for wavelength of excimer laser at 308 nm or i-line of Hg-light source at 360 nm.…”

Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography system

“…Tanaka and Thiel have shown fabricating spatial voxel to sub-120 nm with the two-photo-absorption technology [28,29]. Qi got a single polymerized tip with a diameter of 120 nm with the same technical route [30]. …”