3D Micro-Optics Via Ultrafast Laser Writing: Miniaturization, Integration, and Multifunctionalities

Žukauskas, Andrius; Malinauskas, Mangirdas; Brasselet, Étienne; Juodkazis, Saulius

doi:10.1016/b978-0-323-35321-2.00014-5

Cited by 2 publications

(4 citation statements)

References 117 publications

(121 reference statements)

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“…It is notable for high transparency and low absorption in the VIS and NIR spectrum [11]. Polymerized structures exhibit low shrinkage [23], refractive index similar to common glasses [24,25] for 𝜆 > 400 nm, high mechanical strength and chemical compatibility [26,27]. SZ2080™ consists of MAPTMS and zirconium propoxide (ZPO), diluted in isopropanol (IPA).…”

Section: Methodsmentioning

confidence: 99%

“…Fine-tuning of parameters and 3D models offers a suitable workaround for use of SZ2080™ without PI [30]. We expect typical 4% Fresnel reflection losses at λ=650 nm from polymer surfaces due to approximate known refractive index of n=1.5 [24,25].…”

Section: Methodsmentioning

confidence: 99%

“…where T is total measured transmittance and i -interface index. Internal absorption losses are regarded as negligible due to extremely thin (10 𝜇m, in contrast with an order higher [17]) layers and low SZ2080™ material absorption [24,25]. Eq.…”

Section: Methodsmentioning

confidence: 99%

See 2 more Smart Citations

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Galvanauskas¹,

Astrauskyte²,

Balcas³

et al. 2023

Preprint

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Laser Direct Writing (LDW) allows for the fabrication of complex free-form structures, particularly advantageous in micro-optic applications when used in conjunction with high-performance polymers, such as SZ2080™. Nonetheless, high-complexity and integrated micro-optical elements often manifest multiple interfaces, resulting in increased Fresnel reflection losses. While conventional physical vapour deposition processes are usually employed in the manufacture of high-precision optics, such methods are incapable of producing uniform coatings on micrometer scale complex free-form structures. Atomic Layer Deposition (ALD) is an alternative highly flexible coating process, able to coat intricate geometries down to nano-scale. We propose the use of LDW in conjunction with ALD in the production of highly efficient anti-reflective (AR) coated functional free-form sub-100 μm micro-optic elements - multi-layer platforms and triplet objectives. Low-temperature deposition of aluminum oxide and titanium oxide AR coating proved to be compatible with SZ2080™ polymer structures, as no loss of optical function was observed. In addition, a substantial increase in transmittance, up to 99.9% per interface, is seen. Such findings prove suitable for use in highly efficient compound micro-lens arrays, greatly integrated solutions, and low-loss photonic components making them readily available for Photonic Integrated Circuits (PICs).

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Galvanauskas¹,

Astrauskyte²,

Balcas³

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…Moreover, the inherent three-dimensional structuring capabilities of proposed approach allows considering the fabrication of dielectric devices on curved and flexible substrates [15] while the structured material itself can be reconfigurable under external forcing for instance by using elastomers [16]. In present case, we choose the hybrid (20% inorganic, 80% organic) photo-resist SZ2080 whose refractive index is n + in " = 1.474 + i0.08 over the 500 − 800 nm wavelength range [17]. Such a material has a low shrinkage, high optical transmissivity, and is widely used for micro-optical elements [18][19][20][21].…”

mentioning

confidence: 99%

Dielectric geometric phase optical elements fabricated by femtosecond direct laser writing in photoresists

Wang

Kuchmizhak

Brasselet

et al. 2017

Applied Physics Letters

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We propose to use femtosecond direct laser writing technique to realize dielectric optical elements from photo-resist materials for the generation of structured light from purely geometrical phase transformations. This is illustrated by the fabrication and characterization of spin-to-orbital optical angular momentum couplers generating optical vortices of topological charge from 1 to 20. In addition, the technique is scalable and allows obtaining microscopic to macroscopic flat optics. These results thus demonstrate that direct 3D photopolymerization technology qualifies for the realization of spin-controlled geometric phase optical elements.

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3D Micro-Optics Via Ultrafast Laser Writing: Miniaturization, Integration, and Multifunctionalities

Cited by 2 publications

References 117 publications

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Dielectric geometric phase optical elements fabricated by femtosecond direct laser writing in photoresists

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