2017
DOI: 10.1063/1.4982602
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Dielectric geometric phase optical elements fabricated by femtosecond direct laser writing in photoresists

Abstract: We propose to use femtosecond direct laser writing technique to realize dielectric optical elements from photo-resist materials for the generation of structured light from purely geometrical phase transformations. This is illustrated by the fabrication and characterization of spin-to-orbital optical angular momentum couplers generating optical vortices of topological charge from 1 to 20. In addition, the technique is scalable and allows obtaining microscopic to macroscopic flat optics. These results thus demon… Show more

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Cited by 60 publications
(51 citation statements)
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“…A.2 for determination of optical slit retardance which defines ∆ ). It is comparable with purely dielectric polymerised q-plates [16]. All dielectric q-plates with duty cycle of 0.5 can potentially reach high efficiency and purity (Eqns.…”
Section: Resultsmentioning
confidence: 91%
“…A.2 for determination of optical slit retardance which defines ∆ ). It is comparable with purely dielectric polymerised q-plates [16]. All dielectric q-plates with duty cycle of 0.5 can potentially reach high efficiency and purity (Eqns.…”
Section: Resultsmentioning
confidence: 91%
“…As a powerful 3D micro/nanofabrication technique, femtosecond‐laser direct writing (FsLDW) has emerged as a nanoenabler for the designable fabrication of micro/nanostructures based on a wide range of materials . Especially for metals, FsLDW technology is distinguished by its mask‐free processing capability, arbitrary shape designability, high spatial resolution, ease of integration, and suitability for various nonplanar substrates.…”
Section: Introductionmentioning
confidence: 99%
“…Currently, the designable fabrication and integration of complex 3D metallic micro/nanostructures for the development of metallic micro/nanodevices remains a challenge.As a powerful 3D micro/nanofabrication technique, femtosecond-laser direct writing (FsLDW) has emerged as a nanoenabler for the designable fabrication of micro/nanostructures based on a wide range of materials. [33][34][35][36][37][38][39][40][41][42] Especially for metals, FsLDW technology is distinguished by its mask-free processing capability, arbitrary shape designability, high spatial resolution, ease of integration, and suitability for various nonplanar substrates. In the past decade, with the help of FsLDW technology, great success has been achieved in the fabrication and integration of metallic micro/nanostructures, promoting the rapid development of a series of scientific fields.…”
mentioning
confidence: 99%
“…There have been a multitude of studies regarding the manufacture of these phase plates, including molding techniques [34] , e-beam lithography [35] , e-beam deposition [36] , and direct laser writing by femtosecond laser pulses [37][38][39][40] . Utilizing femtosecond laser, Wang et al [39,40] fabricated microscale geometric phase optical elements from photoresist materials. These phase plates manufactured by femtosecond laser were made from polymer or resist covered on the glass substrate, of which the laser-induced damage thresholds were too low to be used for high-power applications.…”
Section: Introductionmentioning
confidence: 99%