Process kit and wafer temperature effects on dielectric etch rate and uniformity of electrostatic chuck Low voltage and high speed operating electrostatic wafer chuck

Chemiluminescence from Ni(CO)4 and Fe(CO)5 collisions with metastable He, Ne, and Ar atoms is described. The emission spectra are due to atomic Ni and Fe. An analysis of these spectra indicate a dissociative energy transfer process which is not spin–differentiated among the metal atom states. Because of this, certain low-lying quintet states are seen here in emission for the first time. Steady state population analysis of all features permits a determination of the radiative lifetimes of these new states. For both carbonyls, a restricted statistical rate theory, in which the CO fragments are allowed to translate in one dimension only (the radial reaction coordinate) and are prohibited from rotating, gives good agreement with all the data. The nature of metastable electronic energy transfer is compared to photolytic energization, and a comparison of the likely excited electronic states involved in each indicates the source of the differences in product distributions observed by each method.

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Articles you may be interested inA long-range electrostatic potential based on the Wolf method charge-neutral conditionThe results of the potential inversion methods of Dunham, Simons, Parr, and Finlan, Thakkar, Huffaker, and the Pade approximate technique are presented for the X 2~ + state of BeAr+. The method of Thakker is shown to yield reasonable behavior at long range, leading to an ion-induced dipole interaction. A simple model potential is shown to provide a good description of the bonding in both the ground state and the A 'n, state. The effective nuclear charge of Be+ is found to be 1.29 in the X state and 1.88 in the A state.Integration of the various potentials to determine the vibrational eigenvalues shows the superiority of the Thakkar and Huffaker methods and shows the three parameter model potential to be a very good representation of the true potential.

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