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We present an integrated microfluidic system developed based on semiconductor and flat panel display compatible technology to facilitate mass manufacturability of next generation Lab-on-Chip systems. Tailored to different dynamic specifications, two semiconductor grade polymers are selected and used for device fabrication. Compared with PDMS based approach, the selected polymers and optimized excimer laser-aided transferring technique serve as the key factors to enable multi-step and high controllable diagnostic point-of-care platforms with integrated electrical and optical detection schemes.