We demonstrate theoretically a polarization-independent guided-mode resonant filter with only a one dimensional grating. A rigorous method, the modal method by Fourier expansion, is used to compute the diffracted efficiencies of the grating. Wave-vector analysis fails to correctly design a polarization-independent structure. We show that a rigorous analysis of the resonances must be employed to obtain such a device; using a pole approach, we study the effects of grating parameters on the resonances of both polarizations.

Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.

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