The constant development and improvement of microelectromechanical systems (MEMS) have been given a great opportunity to develop new reliable microsystems devices for biomedical research. This article presents a locally addressable 2-D arrayed indium-tin oxide microelectrode platform with integrated thin-film transistors (TFTs) for biological and chemical sensing. Microelectrode arrays (MEAs) using TFT have the advantage of being transparent with a high density of microelectrodes on a large surface. In vitro 2-D electrical measurements on 28 parallel-connected lines selected from a 22 500 MEA were successfully performed with heart cells for the first time. Observation of cell contraction was performed simultaneously with an inverted microscope. Voltammetry and amperometry measurements were also demonstrated using the transparent microelectrodes as working electrodes and an integrated Ag/AgCl reference electrode. Due to its unique features, we believe that the TFT platform can provide more understanding of the key communication between heart cells, and large-scale cardiovascular and nervous systems. As a result, the platform offers unique access to versatile Manuscript

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A label-free immunosensor using thin film transistor microelectrode arrays (TFT-µEAs) derived from flat-panel technology has been developed for the first time. The TFT-µEAs used here incorporate a large sensing area of 15 mm × 15 mm with a 150 × 150 array of transparent indium tin oxide (ITO) electrodes placed at a 100 μm pixel pitch. Anti-human serum albumin (HSA) IgG was characterized to be immobilized on functionalized ITO electrodes. HSA, which is one of the indexes for liver functions, was successfully detected by recording the change of real-time current based on the change in the electric double layer capacitance before and after conjugation of HSA with anti-HSA IgG. Ionic strength and pH value of HSA solution were optimized. In 0.01 mM phosphate buffered saline with pH 6.0, linear range of HSA was determined as 0.3–300 pM. The present TFT-µEAs are applicable to a label-free multiple immunosensing by patterning antibodies on its surface.

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