Abstract-Microwave resonator sensor has been applied to various fields of measurement. A frequency source with low phase noise, low stray, low power consumption, small step is the key to measurement of microwave resonator sensor. In order to adapt the requirements of the measurement, this paper selects and uses HMC833 phase locked loop (PLL) chip to design frequency source, and uses FPGA to control PLL chip, designs a reliable frequency source through taking full advantage of FPGA and low phase noise and low stray of HMC833. At last of this paper, test results show that the frequency source can meet each requirement.

Abstract-This paper puts forward the passive and wireless SiCN temperature sensor in the applicability and necessity of the turbine engine internal environment temperature measurement. Using the principle of resonance frequency scanning tracking method based on perturbation to be the system test method, while the sensor feedback signal and the input signal ratio (S 11 ) parameter as data analysis, and establish the relationship between the resonance frequency and temperature by means of tests. Experimental results show that with increasing temperature from 25 to 300 , the SiCN sensor resonance frequency ℃ ℃ decreases. Corresponds to the theoretical derivation, and the minimum frequency temperature gradient is 45.92kHz/ . ℃ Therefore, under certain conditions, the hardware system can replace the network analyzer to work at the temperature test of SiCN sensor.

The SiCN temperature sensor is a passive wireless sensor cavity, which uses SiCN ceramic as dielectric resonator, the material has some advantages such as thermal shock, corrosion and oxidation resistance, etc. Through the analysis of resonator sensor modeling, uses the theory of weak-disturbance modifying measuring, and uses the NI Company of the PXIe-5644R vector signal transceiver (VST), circulator, waveguide and high-frequency devices, the paper designs a SiCN temperature sensor detection system based on LabVIEW. The PC displays processing analysis and storages the sensor signal, so as to measure the characteristics of the sensor. The system can detect a variety of models of the sensor, and has a strong ability to upgrade and expand.

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