Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

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We outline the fabrication of piezoelectric through-pores in crystalline quartz using a rapid micromachining process, and demonstrate piezoelectric deformation of the pore. The single-step fabrication technique combines ultraviolet (UV) laser irradiation with a thin layer of absorbing liquid in contact with the UV-transparent quartz chip. The effects of different liquid media are shown. We demonstrate that small exit pores, with diameters nearing the 193 nm laser wavelength and with a smooth periphery, can be achieved in 350 μm thick quartz wafers. Special crater features centring on the exit pores are also fabricated, and the depth of these craters are tuned. Moreover, by applying a voltage bias across the thickness of this piezoelectric wafer, we controllably contract and expand the pore diameter. We also provide a sample application of this device by piezoelectrically actuating alamethicin ion channels suspended over the deformable pore.

We present first results from a hybrid coplanar waveguide microfluidic tank circuit for monitoring lipid bilayer formation and fluctuations of integrated proteins. The coplanar waveguide is a radio frequency resonator operating at ~250 MHz. Changes within the integrated microfluidic chamber, such as vesicle bursting and subsequent nanopore formation alter the reflected signal, and can be detected with nanosecond resolution. We show experimental evidence of such alterations when the microfluidic channel is filled with giant unilamellar vesicles (GUVs). Subsequent settling and bursting of the GUVs form planar lipid bilayers, yielding a detectable change in the resonant frequency of the device. Results from finite element simulations of our device correlate well with our experimental evidence. These simulations also indicate that nanopore formation within the bilayer is easily detectable. The simulated structure allows for incorporation of microfluidics as well as simultaneous RF and DC recordings. The technique holds promise for high throughput drug screening applications and could also be used as an in-plane probe for various other applications. It opens up possibilities of exploring ion channels and other nano scale pores in a whole new frequency band allowing for operating at bandwidths well above the traditional DC methods.

An acoustoelectric current driven through a quantum point contact (QPC) on a suspended nanobridge by surface acoustic waves displays a non-trivial behavior in the presence of a perpendicular magnetic field. Our study reveals that the dependencies of this current on the QPC gate voltage and magnetic field can be explained by a variable material parameter r m. We develop a theoretical model for this phenomenon based on the modification of the Coulomb interaction and, correspondingly, the electron-SAWs coupling in the presence of the electron confinement.