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In this work, CNTs have been bombarded with low energy N ions. X-ray photoelectron spectroscopy have been used to determine the binding configuration of the N-doped CNTs. AFM was also used to determine their morphology and mechanical properties. The same morphology is maintained after the N 2 + bombardment. XPS analysis shows that the N 1s core level spectra for N-doped CNTs can be deconvoluted in terms of two peaks related to sp 2 (C -N=C) and sp 3 hybridization (C -N configuration). This interpretation is in concordance with the increase of the hardness observed by AFM nanoindentations when the sp 3 contributions increase.

A recently proposed model for quantitative analysis of reflection electron energy-lass spectra (REELS) has been applied to evaluate the dielectric loss function of Si and SiO, in the 4-100 eV energy range, and to determine inelastic scattering properties for these materials for low-energy electrons (5Oo--10 OOO eV). Appropriate trial energy-loss functions (i.e. Im{l/c}) are used and the best loss function is found from the criterion that a satisfactory quantitative agreement is obtained between the simulated and experimental inelastic scattering cross-sections at several primary electron energies. The fact that the energy-loss functions determined in this work agree remarkably well with optical data gives some confidence in the applied procedure. In addition, the effective inelastic mean free paths of the electrons as a function of the primary energy and the path travelled inside the medium have also been determined in terms of the respective energy-loss functions.

Silicon–carbon–nitrogen alloys have been deposited by electron cyclotron resonance plasma chemical vapor deposition. Nitrogen, methane, and argon diluted silane have been used as precursor gases. The properties of the deposited films were studied by spectroscopic ellipsometry, Fourier transform infrared spectroscopy, X-ray photoelectron, and Auger electron spectroscopy. The structure and bond formation in the SiCN films is discussed in terms of the present results.

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