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Nano periodic structure formation in 4H-SiC crystal using femtosecond laser double-pulses The photo-induced periodic nano structure inside 4H-SiC have been induced by a femtosecond double pulse train. The alignment of the periodic structure is in the direction independently from crystal orientation. In particular, FE-SEM analysis revealed that the periodic structure on the fractured surface can be classified into two categories of the polarization-dependent and polarization-independent.