Nano Periodic Structure Formation in 4H–SiC Crystal Using Femtosecond Laser Double-Pulses

Abstract

Nano periodic structure formation in 4H-SiC crystal using femtosecond laser double-pulses The photo-induced periodic nano structure inside 4H-SiC have been induced by a femtosecond double pulse train. The alignment of the periodic structure is in the direction independently from crystal orientation. In particular, FE-SEM analysis revealed that the periodic structure on the fractured surface can be classified into two categories of the polarization-dependent and polarization-independent.

Periodicity control of laser-induced periodic nanostructures by thin deposition layer on sapphire substrate

“…Further details are actively under discussion. Research regarding the crystal state of LIPSS still continues, [7][8][9][10] and we have previously reported that it depends on the irradiated material. 7) Previous published literature shows that the period of LIPSS changes depending on a number of factors including, the number of superimposed laser pulses, 11,12) laser energy fluence, 4,13,14) laser scanning rate, 15) laser wavelength, 14,[16][17][18][19] and irradiated material.…”

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

“…Therefore, it has been chosen as the substrate for the samples used in this study. We investigated the crystallinity of the LIPSS by Synchrotron high-energy x-ray diffraction (XRD), through a correlation with crystallographic analysis of transmission electron microscope (TEM) observation [38][39][40][41] .…”