Titanium is a promising new material system for the bulk micromachining of microelectromechanical ͑MEMS͒ devices. Titaniumbased MEMS have the potential to be used for a number of applications, including those which require high fracture toughness or biocompatibility. The bulk titanium etch rate, TiO 2 mask etch rate, and surface roughness in an inductively coupled plasma ͑ICP͒ as a function of various process parameters are presented. Optimized conditions are then used to develop the titanium ICP deep etch ͑TIDE͒ process. The TIDE process is capable of producing high aspect ratio structures with smooth sidewalls at etch rates in excess of 2 m/min, providing a new means for the microfabrication of titanium-based MEMS devices.

Microneedle-based drug delivery has shown considerable promise for enabling painless transdermal and hypodermal delivery of conventional and novel therapies. However, this promise has yet to be fully realized due in large part to the limitations imposed by the micromechanical properties of the material systems being used. In this paper, we demonstrate titanium-based microneedle devices developed to address these limitations. Microneedle arrays with in-plane orientation are fabricated using recently developed high-aspect-ratio titanium bulk micromachining and multilayer lamination techniques. These devices include embedded microfluidic networks for the active delivery and/or extraction of fluids. Data from quantitative and qualitative characterization of the fluidic and mechanical performance of the devices are presented and shown to be in good agreement with finite-element simulations. The results demonstrate the potential of titanium micromachining for the fabrication of robust, reliable, and low-cost microneedle devices for drug delivery.

We report a technique for the alignment of self-assembled protein systems, such as F-actin bundles and microtubules, in a surface-modified titanium or silicon microfluidic device. Assembling filamentous protein systems in a confined geometry produces highly aligned samples for structural and mechanical studies. Biomolecular self-assembly can be investigated in a controlled fashion under different molecular concentration gradients and conditions along a channel length. We have shown that surface-modified devices produced via a high aspect ratio etch process in titanium and silicon can be used to confine and control such macromolecular assemblies and present examples of F-actin bundles and microtubules in this system.

By carefully tuning the screening effects of monovalent salt in solution, it is possible to control the formation of different lipid morphologies on a titanium dioxide substrate. A transition from an absorbed vesicle layer to fluid lipid bilayers is observed as a function of monovalent salt concentration in solution, and, above a threshold salt concentration, a network of lipid tubules with a fascinating distorted-hexagonal structure is formed in two dimensions on the substrate. We present fluorescence microscopy data for these different morphologies, confirming the connectivity and fluidity of the bilayers and tubules.